Specifies procedures for determining a sensitivity figure for mass-spectrometer type leak detectors. Two procedures are outlined, one for determining minimum detectable leak rate; the other for determining minimum detectable concentration ratio. Specifically excepted are sensing elements without the integral high vacuum system needed to maintain them at low pressure.
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Methods of calibrating leak-detectors of the mass-spectrometer-type used in the field of vacuum technology
BSI Group , 03/31/1980
Pages: 14
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