BS PD ISO/TS 20175:2018

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Vacuum technology. Vacuum gauges. Characterization of quadrupole mass spectrometers for partial pressure measurement

BSI Group , 05/08/2018

Pages: 32

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BS PD ISO/TS 20175:2018 describes procedures to characterize quadrupole mass spectrometers (QMSs) with an ion source of electron impact ionization and which are designed for the measurement of atomic mass-to-charge ratios m/z < 300.Cross References:ISO 3567:2011 Ed 1ISO 14291ISO/IEC GUIDE 98-3:2008 Ed 1GUM: 1995DIN 28410