IEST RP-CC013.3

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Calibration Procedures and Guidelines for Selecting Equipment Used in Testing Cleanrooms and Other Controlled Environments

Institute of Environmental Sciences and Technology , 08/01/2012

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IEST RP-CC013.3 covers procedures for calibrating and verifying equipment used in char-acterizing cleanrooms and for determining intervals of calibration. The RP includes general procedures for calibrating aerosol generators, photometers, ane-mometers, airflow capture hoods, temperature measurement systems and devices, pressure and vacuum gauges, polymicrosphere (PSL) generators, aerosol diluters, and condensation nuclei counters. Where available, references for calibrating other instruments are provided